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Fabrication of c-Si HIT solar cells by PECVD

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Resumo:This dissertation had the objective of fabricating HIT solar cells. These solar cells are composed of amorphous silicon layers, doped and intrinsic, with thicknesses at the nanometer scale, deposited in a silicon wafer’s surface. The amorphous silicon layers used in these solar cells were produced in the PECVD system from Material Science Department using low temperatures (200ºC). Their properties were optimized, studying the effect of factors such as doping gas flows and deposition pressures in these properties. Once optimized, the amorphous silicon with the best properties were used in the fabrication of the solar cells. The thickness of the layers was also studied with the goal to optimize the efficiency of the HIT solar cells. This work is part of the research project: FLEXSOLAR - Highly Efficient and Flexible Thin Film Epitaxial Silicon / Perovskite Tandem Solar Cells.
Autores principais:Azevedo, André Filipe Nobre
Assunto:HIT solar cell PECVD thin film amorphous silicon optimization device fabrication
Ano:2022
País:Portugal
Tipo de documento:dissertação de mestrado
Tipo de acesso:acesso aberto
Instituição associada:Universidade Nova de Lisboa
Idioma:inglês
Origem:Repositório Institucional da UNL
Descrição
Resumo:This dissertation had the objective of fabricating HIT solar cells. These solar cells are composed of amorphous silicon layers, doped and intrinsic, with thicknesses at the nanometer scale, deposited in a silicon wafer’s surface. The amorphous silicon layers used in these solar cells were produced in the PECVD system from Material Science Department using low temperatures (200ºC). Their properties were optimized, studying the effect of factors such as doping gas flows and deposition pressures in these properties. Once optimized, the amorphous silicon with the best properties were used in the fabrication of the solar cells. The thickness of the layers was also studied with the goal to optimize the efficiency of the HIT solar cells. This work is part of the research project: FLEXSOLAR - Highly Efficient and Flexible Thin Film Epitaxial Silicon / Perovskite Tandem Solar Cells.

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