Publicação
Bulk-micromachined tunable fabry-perot microinterferometer for the visible spectral range
| Resumo: | The design, fabrication and measured characteristics of a bulk-micromachined tunable Fabry-Perot MicroInterferometer (FPMI) for the visible spectral range are presented. The FPMI is formed by two parallel 40 nm thick silver mirrors supported by a 300 nm low-tensile stress silicon nitride membrane with a square aperture (side length of 2 mm) and initial cavity gap of 1.2 mm. One of the mirrors is fixed, the other is under tension on a movable Si frame, which is electrostatically deflected, using several distributed electrodes, to control cavity spacing and mirror parallelism. Performance achieved is: high flatness of the mirrors, low control voltages (<21 V for 450 nm deflection) and simple fabrication. |
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| Autores principais: | Correia, J. H. |
| Outros Autores: | Bartek, M.; Wolffenbuttel, R. F. |
| Assunto: | Fabry-perot microinterferometer Visible spectral range |
| Ano: | 1998 |
| País: | Portugal |
| Tipo de documento: | comunicação em conferência |
| Tipo de acesso: | acesso aberto |
| Instituição associada: | Universidade do Minho |
| Idioma: | inglês |
| Origem: | RepositóriUM - Universidade do Minho |
| Resumo: | The design, fabrication and measured characteristics of a bulk-micromachined tunable Fabry-Perot MicroInterferometer (FPMI) for the visible spectral range are presented. The FPMI is formed by two parallel 40 nm thick silver mirrors supported by a 300 nm low-tensile stress silicon nitride membrane with a square aperture (side length of 2 mm) and initial cavity gap of 1.2 mm. One of the mirrors is fixed, the other is under tension on a movable Si frame, which is electrostatically deflected, using several distributed electrodes, to control cavity spacing and mirror parallelism. Performance achieved is: high flatness of the mirrors, low control voltages (<21 V for 450 nm deflection) and simple fabrication. |
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