Detalhes bibliográficos
| Resumo: | A FPGA (Field Programmable Gate Array) controlled inclinometer based on MEMS structures is presented in this paper. Pull-in voltage measurements are used in this work as the transduction mechanism. The pull-in phenomenon is characterized by the sudden loss of stability in electrostatically actuated parallel-plate actuators and since pull-in voltage is stable and easy to measure, it enables an interesting transduction mechanism. By successively bringing the microstructure to pullin while measuring the pull-in voltage allows the detection of external accelerations. A FPGA is responsible to control the entire system increasing its performance and reliability. The sensor resolution is defined by the resolution of the measured pull-in, i.e., resolution of the actuation voltage. Experimental results show a sensitivity of 50 mV/o with the resolution of the actuation voltage set below 1 V using a 24-bit Digital-to-Analog Converter (DAC). |
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| Autores principais: | Alves, F. S. |
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| Outros Autores: | Dias, Rosana A.; Cabral, Jorge; Rocha, Luís A.; Monteiro, João L. |
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| Assunto: | MEMS Pull-in voltage Inclinometer FPGA |
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| Ano: | 2013 |
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| País: | Portugal |
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| Tipo de documento: | comunicação em conferência |
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| Tipo de acesso: | acesso restrito |
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| Instituição associada: | Universidade do Minho |
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| Idioma: | inglês |
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| Origem: | RepositóriUM - Universidade do Minho |
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