Detalhes bibliográficos
| Resumo: | A MEMS high-resolution inclinometer is presented in this paper. Unlike traditional approaches, a transduction mechanism based on the measurement of pull-in voltages is used for the realization of the sensor. The advantage is on-device capability for auto-calibration and thermal compensation, and more relaxed specifications for the capacitive readout electronics. In addition, dedicated MEMS microstructures with extra proof-mass are proposed and tested for high-resolution applications. The microstructures have differential actuation electrodes (with a common electrode) resulting in two pull-in voltages that change differentially with applied acceleration. The device shows a sensitivity of 300 mV/º with a non-linearity below 0.5%FS (Full Scale of ±10º). The measured noise level of 3mV sets the system resolution at 0.01º, above the theoretical resolution limit of 0.001º (due to the actuation voltage resolution of 300μV). |
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| Autores principais: | Alves, F. S. |
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| Outros Autores: | Dias, R. A.; Cabral, Jorge; Gaspar, J.; Rocha, L. A. |
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| Assunto: | Pull-in Voltage MEMS Inclinometer FPGA |
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| Ano: | 2013 |
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| País: | Portugal |
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| Tipo de documento: | comunicação em conferência |
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| Tipo de acesso: | acesso restrito |
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| Instituição associada: | Universidade do Minho |
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| Idioma: | inglês |
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| Origem: | RepositóriUM - Universidade do Minho |
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