Publication
Determination of refractive index contrast and surface contraction in waveguide channels using multiobjective genetic algorithm applied to spectroscopic ellipsometry
| Summary: | The application of spectroscopic ellipsometry for the characterization of UV-patterned channel waveguides to obtain the refractive index contrast and surface deformation profile is presented. Thin films were prepared with organic-inorganic di-ureasils hybrids modified with zirconium tetra-propoxide deposited in silica on silicon substrates. The channel waveguides were produced by direct writing using UV laser radiation. The refractive index contrast and the surface ablation induced by the UV optical signal were estimated by ellipsometry being 4.5 x 10(-3) and 30.5 nm, respectively. The deepness of the surface ablation due to the UV exposition was also estimated by atomic force microscopy measurements that pointed out a value of 31.0 +/- 1.0 nm, concordant with the ellipsometric calculations. The near-field intensity technique was used as a support for contextualizing the proposed ellipsometry method for the characterization of refractive index profiles. The estimated refractive index contrast (2.0 x 10(-3)) is in a good agreement with the refractive index contrast derived from ellipsometry. |
|---|---|
| Main Authors: | Fernandes, Vasco R. |
| Other Authors: | Santos Vicente, Carlos Miguel; Pecoraro, Edison; Karpinsky, Dmitry; Kholkin, Andrei L.; Wada, Naoya; André, Paulo S.; Ferreira, Rute A. S. |
| Subject: | Ellipsometry Genetic algorithms (GAs) Optical waveguides Organic–inorganic hybrid materials Refractive index |
| Year: | 2011 |
| Country: | Portugal |
| Document type: | article |
| Access type: | restricted access |
| Associated institution: | Universidade de Aveiro |
| Language: | English |
| Origin: | RIA - Repositório Institucional da Universidade de Aveiro |
| _version_ | 1877768523858575360 |
|---|---|
| author | Fernandes, Vasco R. |
| author2 | Santos Vicente, Carlos Miguel Pecoraro, Edison Karpinsky, Dmitry Kholkin, Andrei L. Wada, Naoya André, Paulo S. Ferreira, Rute A. S. |
| author2_role | author author author author author author author |
| author_facet | Fernandes, Vasco R. Santos Vicente, Carlos Miguel Pecoraro, Edison Karpinsky, Dmitry Kholkin, Andrei L. Wada, Naoya André, Paulo S. Ferreira, Rute A. S. |
| author_role | author |
| country_str | PT |
| creators_json_txt | [{\"Person.name\":\"Fernandes, Vasco R.\"},{\"Person.name\":\"Santos Vicente, Carlos Miguel\"},{\"Person.name\":\"Pecoraro, Edison\"},{\"Person.name\":\"Karpinsky, Dmitry\"},{\"Person.name\":\"Kholkin, Andrei L.\"},{\"Person.name\":\"Wada, Naoya\"},{\"Person.name\":\"André, Paulo S.\"},{\"Person.name\":\"Ferreira, Rute A. S.\"}] |
| datacite.creators.creator.creatorName.fl_str_mv | Fernandes, Vasco R. Santos Vicente, Carlos Miguel Pecoraro, Edison Karpinsky, Dmitry Kholkin, Andrei L. Wada, Naoya André, Paulo S. Ferreira, Rute A. S. |
| datacite.date.Accepted.fl_str_mv | 2011-01-01T00:00:00Z |
| datacite.date.embargoed.fl_str_mv | 10000-01-01T00:00:00Z |
| datacite.rights.fl_str_mv | http://purl.org/coar/access_right/c_16ec |
| datacite.subjects.subject.fl_str_mv | Ellipsometry Genetic algorithms (GAs) Optical waveguides Organic–inorganic hybrid materials Refractive index |
| datacite.titles.title.fl_str_mv | Determination of refractive index contrast and surface contraction in waveguide channels using multiobjective genetic algorithm applied to spectroscopic ellipsometry |
| dc.creator.none.fl_str_mv | Fernandes, Vasco R. Santos Vicente, Carlos Miguel Pecoraro, Edison Karpinsky, Dmitry Kholkin, Andrei L. Wada, Naoya André, Paulo S. Ferreira, Rute A. S. |
| dc.date.Accepted.fl_str_mv | 2011-01-01T00:00:00Z |
| dc.date.embargoed.fl_str_mv | 10000-01-01T00:00:00Z |
| dc.format.none.fl_str_mv | application/pdf |
| dc.identifier.none.fl_str_mv | http://hdl.handle.net/10773/7089 |
| dc.language.none.fl_str_mv | eng |
| dc.rights.none.fl_str_mv | http://purl.org/coar/access_right/c_16ec |
| dc.subject.none.fl_str_mv | Ellipsometry Genetic algorithms (GAs) Optical waveguides Organic–inorganic hybrid materials Refractive index |
| dc.title.fl_str_mv | Determination of refractive index contrast and surface contraction in waveguide channels using multiobjective genetic algorithm applied to spectroscopic ellipsometry |
| dc.type.none.fl_str_mv | http://purl.org/coar/resource_type/c_6501 |
| description | The application of spectroscopic ellipsometry for the characterization of UV-patterned channel waveguides to obtain the refractive index contrast and surface deformation profile is presented. Thin films were prepared with organic-inorganic di-ureasils hybrids modified with zirconium tetra-propoxide deposited in silica on silicon substrates. The channel waveguides were produced by direct writing using UV laser radiation. The refractive index contrast and the surface ablation induced by the UV optical signal were estimated by ellipsometry being 4.5 x 10(-3) and 30.5 nm, respectively. The deepness of the surface ablation due to the UV exposition was also estimated by atomic force microscopy measurements that pointed out a value of 31.0 +/- 1.0 nm, concordant with the ellipsometric calculations. The near-field intensity technique was used as a support for contextualizing the proposed ellipsometry method for the characterization of refractive index profiles. The estimated refractive index contrast (2.0 x 10(-3)) is in a good agreement with the refractive index contrast derived from ellipsometry. |
| dirty | 0 |
| eu_rights_str_mv | restrictedAccess |
| format | article |
| id | ria_a29e4e63b3a6a17f3bd7751cb1c4c359 |
| identifier.url.fl_str_mv | http://hdl.handle.net/10773/7089 |
| inst_facet_str | urn:organizationAcronym:ua{{{_:::_}}}Universidade de Aveiro |
| instacron_str | ua |
| institution | Universidade de Aveiro |
| instname_str | Universidade de Aveiro |
| language | eng |
| network_acronym_str | ria |
| network_name_str | RIA - Repositório Institucional da Universidade de Aveiro |
| oai_identifier_str | oai:ria.ua.pt:10773/7089 |
| organization_str_mv | urn:organizationAcronym:ua |
| person_str_mv | Fernandes, Vasco R. Santos Vicente, Carlos Miguel Pecoraro, Edison Karpinsky, Dmitry Kholkin, Andrei L. Wada, Naoya André, Paulo S. Ferreira, Rute A. S. |
| publishDate | 2011 |
| repo_facet_str | urn:repositoryAcronym:ria{{{_:::_}}}RIA - Repositório Institucional da Universidade de Aveiro |
| reponame_str | RIA - Repositório Institucional da Universidade de Aveiro |
| repository_id_str | urn:repositoryAcronym:ria |
| service_str_mv | urn:repositoryAcronym:ria |
| spelling | porThe application of spectroscopic ellipsometry for the characterization of UV-patterned channel waveguides to obtain the refractive index contrast and surface deformation profile is presented. Thin films were prepared with organic-inorganic di-ureasils hybrids modified with zirconium tetra-propoxide deposited in silica on silicon substrates. The channel waveguides were produced by direct writing using UV laser radiation. The refractive index contrast and the surface ablation induced by the UV optical signal were estimated by ellipsometry being 4.5 x 10(-3) and 30.5 nm, respectively. The deepness of the surface ablation due to the UV exposition was also estimated by atomic force microscopy measurements that pointed out a value of 31.0 +/- 1.0 nm, concordant with the ellipsometric calculations. The near-field intensity technique was used as a support for contextualizing the proposed ellipsometry method for the characterization of refractive index profiles. The estimated refractive index contrast (2.0 x 10(-3)) is in a good agreement with the refractive index contrast derived from ellipsometry.application/pdfengporDetermination of refractive index contrast and surface contraction in waveguide channels using multiobjective genetic algorithm applied to spectroscopic ellipsometryFernandes, Vasco R.Santos Vicente, Carlos MiguelPecoraro, EdisonKarpinsky, DmitryKholkin, Andrei L.Wada, NaoyaAndré, Paulo S.Ferreira, Rute A. S.Handlehttp://hdl.handle.net/10773/7089ISSNIsPartOf0733-8724DOIIsPartOf10.1109/JLT.2011.216392410000-01-01T00:00:00Z2011-01-01T00:00:00Z2011http://purl.org/coar/access_right/c_16ecrestricted accessporEllipsometryporGenetic algorithms (GAs)porOptical waveguidesporOrganic–inorganic hybrid materialsporRefractive index986614 byteshttp://purl.org/coar/access_right/c_16ecapplication/pdffulltexthttps://ria.ua.pt/bitstream/10773/7089/1/2011_jlt_oreo.pdfliteraturehttp://purl.org/coar/resource_type/c_6501journal article |
| spellingShingle | Determination of refractive index contrast and surface contraction in waveguide channels using multiobjective genetic algorithm applied to spectroscopic ellipsometry Fernandes, Vasco R. Ellipsometry Genetic algorithms (GAs) Optical waveguides Organic–inorganic hybrid materials Refractive index |
| status | SINGLETON |
| subject.fl_str_mv | Ellipsometry Genetic algorithms (GAs) Optical waveguides Organic–inorganic hybrid materials Refractive index |
| title | Determination of refractive index contrast and surface contraction in waveguide channels using multiobjective genetic algorithm applied to spectroscopic ellipsometry |
| title_full | Determination of refractive index contrast and surface contraction in waveguide channels using multiobjective genetic algorithm applied to spectroscopic ellipsometry |
| title_fullStr | Determination of refractive index contrast and surface contraction in waveguide channels using multiobjective genetic algorithm applied to spectroscopic ellipsometry |
| title_full_unstemmed | Determination of refractive index contrast and surface contraction in waveguide channels using multiobjective genetic algorithm applied to spectroscopic ellipsometry |
| title_short | Determination of refractive index contrast and surface contraction in waveguide channels using multiobjective genetic algorithm applied to spectroscopic ellipsometry |
| title_sort | Determination of refractive index contrast and surface contraction in waveguide channels using multiobjective genetic algorithm applied to spectroscopic ellipsometry |
| topic | Ellipsometry Genetic algorithms (GAs) Optical waveguides Organic–inorganic hybrid materials Refractive index |
| topic_facet | Ellipsometry Genetic algorithms (GAs) Optical waveguides Organic–inorganic hybrid materials Refractive index |
| url | http://hdl.handle.net/10773/7089 |
| visible | 1 |
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