Publicação
Automated reactive thermal evaporation system for transparent conductive coatings
| Resumo: | This work presents fully automated plasma-enhanced reactive thermal evaporation system (rf-PERTE) that can be used for the deposition of transparent metal oxide films with high reproducibility of their electrical and optical properties. The developed hardware/software platform enables the full control over the critical deposition conditions such as mass flow of oxygen, process pressure, current flowing through crucible and rf-power. For indium oxide films on glass substrates a resistivity of 9×10-4 Ω-cm and a transmittance of 90% in the visible spectral range were achieved without substrate heating. The system is also suitable for the deposition of transparent conducting coatings in a wide range of plastic substrates, for applications in the field of flexible sensors or solar cells. In particular, we have successfully deposited indium oxide on PEN (polyethylene naphthalate) sheets with electrical and optical properties approaching the ones of the films deposited on glass substrates. |
|---|---|
| Autores principais: | Fernandes, Miguel |
| Outros Autores: | Y. Vygranenko, Yuri; Vieira, Manuela; Lavareda, Guilherme; de Carvalho, Carlos Nunes; Amaral, Ana |
| Assunto: | Semiconductor Devices; Microelectronics; Optoelectronics TCO, Solar cell, PLastic substrate |
| Ano: | 2017 |
| País: | Portugal |
| Tipo de documento: | artigo |
| Tipo de acesso: | unknown |
| Instituição associada: | Instituto Superior de Engenharia de Lisboa |
| Idioma: | inglês |
| Origem: | i-ETC : ISEL Academic Journal of Electronics Telecommunications and Computers |
| _version_ | 1868798937899466752 |
|---|---|
| author | Fernandes, Miguel |
| author2 | Y. Vygranenko, Yuri Vieira, Manuela Lavareda, Guilherme de Carvalho, Carlos Nunes Amaral, Ana |
| author2_role | author author author author author |
| author_facet | Fernandes, Miguel Y. Vygranenko, Yuri Vieira, Manuela Lavareda, Guilherme de Carvalho, Carlos Nunes Amaral, Ana |
| author_role | author |
| country_str | PT |
| creators_json_txt | [{\"Person.name\":\"Fernandes, Miguel\"},{\"Person.name\":\"Y. Vygranenko, Yuri\"},{\"Person.name\":\"Vieira, Manuela\"},{\"Person.name\":\"Lavareda, Guilherme\"},{\"Person.name\":\"de Carvalho, Carlos Nunes\"},{\"Person.name\":\"Amaral, Ana\"}] |
| datacite.creators.creator.creatorName.fl_str_mv | Fernandes, Miguel Y. Vygranenko, Yuri Vieira, Manuela Lavareda, Guilherme de Carvalho, Carlos Nunes Amaral, Ana |
| datacite.rights.fl_str_mv | http://purl.org/coar/access_right/c_abf2 |
| datacite.subjects.subject.fl_str_mv | Semiconductor Devices; Microelectronics; Optoelectronics TCO, Solar cell, PLastic substrate |
| datacite.titles.title.fl_str_mv | Automated reactive thermal evaporation system for transparent conductive coatings |
| dc.creator.none.fl_str_mv | Fernandes, Miguel Y. Vygranenko, Yuri Vieira, Manuela Lavareda, Guilherme de Carvalho, Carlos Nunes Amaral, Ana |
| dc.format.none.fl_str_mv | application/pdf |
| dc.identifier.none.fl_str_mv | https://doi.org/10.34629/ipl.isel.i-ETC.36 |
| dc.language.none.fl_str_mv | eng |
| dc.publisher.none.fl_str_mv | ISEL - High Institute of Engineering of Lisbon |
| dc.rights.none.fl_str_mv | http://purl.org/coar/access_right/c_abf2 |
| dc.source.none.fl_str_mv | i-ETC : ISEL Academic Journal of Electronics Telecommunications and Computers; Vol 3, No 1 (2017): The CETC2016 Issue (A); ID-3 i-ETC : ISEL Academic Journal of Electronics Telecommunications and Computers; Vol 3, No 1 (2017): The CETC2016 Issue (A); ID-3 2182-4010 |
| dc.subject.none.fl_str_mv | Semiconductor Devices; Microelectronics; Optoelectronics TCO, Solar cell, PLastic substrate |
| dc.title.fl_str_mv | Automated reactive thermal evaporation system for transparent conductive coatings |
| dc.type.none.fl_str_mv | http://purl.org/coar/resource_type/c_6501 http://purl.org/coar/resource_type/c_1843 |
| description | This work presents fully automated plasma-enhanced reactive thermal evaporation system (rf-PERTE) that can be used for the deposition of transparent metal oxide films with high reproducibility of their electrical and optical properties. The developed hardware/software platform enables the full control over the critical deposition conditions such as mass flow of oxygen, process pressure, current flowing through crucible and rf-power. For indium oxide films on glass substrates a resistivity of 9×10-4 Ω-cm and a transmittance of 90% in the visible spectral range were achieved without substrate heating. The system is also suitable for the deposition of transparent conducting coatings in a wide range of plastic substrates, for applications in the field of flexible sensors or solar cells. In particular, we have successfully deposited indium oxide on PEN (polyethylene naphthalate) sheets with electrical and optical properties approaching the ones of the films deposited on glass substrates. |
| dirty | 0 |
| eu_rights_str_mv | unknown |
| format | article |
| id | ietc_a2b7e504bdadbb3b0d7ba9c58049600d |
| identifier.doi.fl_str_mv | https://doi.org/10.34629/ipl.isel.i-ETC.36 |
| instacron_str | isel |
| institution | Instituto Superior de Engenharia de Lisboa |
| instname_str | Instituto Superior de Engenharia de Lisboa |
| language | eng |
| network_acronym_str | ietc |
| network_name_str | i-ETC : ISEL Academic Journal of Electronics Telecommunications and Computers |
| oai_identifier_str | oai:i-ETC.journals.isel.pt:article/36 |
| organization_str_mv | urn:organizationAcronym:isel |
| person_str_mv | Fernandes, Miguel Y. Vygranenko, Yuri Vieira, Manuela Lavareda, Guilherme de Carvalho, Carlos Nunes Amaral, Ana |
| publishDate | 2017 |
| publisher.none.fl_str_mv | ISEL - High Institute of Engineering of Lisbon |
| reponame_str | i-ETC : ISEL Academic Journal of Electronics Telecommunications and Computers |
| repository_id_str | urn:repositoryAcronym:ietc |
| service_str_mv | urn:repositoryAcronym:ietc |
| spelling | en-USAutomated reactive thermal evaporation system for transparent conductive coatingsFernandes, MiguelY. Vygranenko, YuriVieira, ManuelaLavareda, Guilhermede Carvalho, Carlos NunesAmaral, AnaSemiconductor Devices; Microelectronics; OptoelectronicsTCO, Solar cell, PLastic substrateCopyright (c) 2017 Miguel Fernandeshttp://purl.org/coar/access_right/c_abf2http://creativecommons.org/licenses/by-nc/4.0https://doi.org/10.34629/ipl.isel.i-ETC.36DOIoai:i-ETC.journals.isel.pt:article/36OAIhttp://journals.isel.pt/index.php/i-ETC/article/view/36URLhttps://doi.org/10.34629/ipl.isel.i-ETC.36DOIhttp://journals.isel.pt/index.php/i-ETC/article/view/36/31URLHasVersion2017-10-26T00:00:00Zen-USThis work presents fully automated plasma-enhanced reactive thermal evaporation system (rf-PERTE) that can be used for the deposition of transparent metal oxide films with high reproducibility of their electrical and optical properties. The developed hardware/software platform enables the full control over the critical deposition conditions such as mass flow of oxygen, process pressure, current flowing through crucible and rf-power. For indium oxide films on glass substrates a resistivity of 9×10-4 Ω-cm and a transmittance of 90% in the visible spectral range were achieved without substrate heating. The system is also suitable for the deposition of transparent conducting coatings in a wide range of plastic substrates, for applications in the field of flexible sensors or solar cells. In particular, we have successfully deposited indium oxide on PEN (polyethylene naphthalate) sheets with electrical and optical properties approaching the ones of the films deposited on glass substrates.ISEL - High Institute of Engineering of Lisbonapplication/pdfen-USi-ETC : ISEL Academic Journal of Electronics Telecommunications and Computers; Vol 3, No 1 (2017): The CETC2016 Issue (A); ID-3pt-PTi-ETC : ISEL Academic Journal of Electronics Telecommunications and Computers; Vol 3, No 1 (2017): The CETC2016 Issue (A); ID-32182-4010engjournal articlehttp://purl.org/coar/resource_type/c_6501literatureVoRhttp://purl.org/coar/version/c_970fb48d4fbd8a85http://purl.org/coar/resource_type/c_1843 other research product |
| spellingShingle | Automated reactive thermal evaporation system for transparent conductive coatings Fernandes, Miguel Semiconductor Devices; Microelectronics; Optoelectronics TCO, Solar cell, PLastic substrate |
| status | SINGLETON |
| status_str | VoR |
| subject.fl_str_mv | Semiconductor Devices; Microelectronics; Optoelectronics TCO, Solar cell, PLastic substrate |
| title | Automated reactive thermal evaporation system for transparent conductive coatings |
| title_full | Automated reactive thermal evaporation system for transparent conductive coatings |
| title_fullStr | Automated reactive thermal evaporation system for transparent conductive coatings |
| title_full_unstemmed | Automated reactive thermal evaporation system for transparent conductive coatings |
| title_short | Automated reactive thermal evaporation system for transparent conductive coatings |
| title_sort | Automated reactive thermal evaporation system for transparent conductive coatings |
| topic | Semiconductor Devices; Microelectronics; Optoelectronics TCO, Solar cell, PLastic substrate |
| topic_facet | Semiconductor Devices; Microelectronics; Optoelectronics TCO, Solar cell, PLastic substrate |
| url | https://doi.org/10.34629/ipl.isel.i-ETC.36 |
| visible | 1 |
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