This article is about computer simulation for surface analysis through nuclear techniques, which are mainly non-destructive. The energy analysis method, nuclear reactions and elastic scattering are used. Energy spectra are computer simulated and compared to experimental data, giving sample composition and concentration profiles. Successful applications of the method are illustrated by 12C(d,p0)13C and 18O(p,α0)15N reactions and elastic scattering of (4He)+ ions, for three types of samples. SEM microscopy is used as a complementary technique for surface imaging.

This article is about computer simulation for surface analysis through nuclear techniques, which are mainly non-destructive. The energy analysis method, nuclear reactions and elastic scattering are used. Energy spectra are computer simulated and compared to experimental data, giving sample composition and concentration profiles. Successful applications of the method are illustrated by 18O(p,α0)15N and 12C(d,p0)13C reactions and elastic scattering of (4He)+ ions, for three types of samples. SEM microscopy is used as a complementary technique for surface imaging.