This article is about computer simulation for surface analysis through nuclear techniques, which are mainly non-destructive. The energy analysis method, nuclear reactions and elastic scattering are used. Energy spectra are computer simulated and compared to experimental data, giving sample composition and concentration profiles. Successful applications of the method are illustrated by 12C(d,p0)13C and 18O(p,α0)15N reactions and elastic scattering of (4He)+ ions, for three types of samples. SEM microscopy is used as a complementary technique for surface imaging.

Abstract—This article is about computer simulation for surface analysis through nuclear techniques, which are non-destructive. The energy analysis method is used. Energy spectra are computer simulated and compared to experimental data, giving sample composition and concentration profiles. The method, using elastic scattering of (4He)+ ions, is successfully applied to depth profiling in a target containing a thin film deposited on a thick substrate and in a thick target.

This work is about surface analysis of materials by low energy nuclear techniques, which are non-destructive, and computersimulation. The energy method of analysis is used for nuclear reactions and elastic scattering, as a particular and important case. Energy spectra are computer simulated and compared to experimental data, giving target composition and concentration profile information. The computations use, mainly, target parameterization and published nuclear data, namely for differential cross section and stopping power. The method is successfully applied to concentration profile determination of 12C and 18O nuclei in thick targets by deuteron and proton induced reactions, respectively. Elastic scattering of (4He)+ ions is applied to depth profiling of Al, O and Ag in thick and thin film targets.

This article is about computer simulation for surface analysis through nuclear techniques, which are non-destructive. The energy analysis method is used. Energy spectra are computer simulated and compared to experimental data, giving sample composition and concentration profiles. The method, using elastic scattering of (4He)+ ions, is successfully applied to depth profiling in both thin and thick targets containing Al and O.

This article is about computer simulation for surface analysis through nuclear techniques, which are mainly non-destructive. The energy analysis method, nuclear reactions and elastic scattering are used. Energy spectra are computer simulated and compared to experimental data, giving sample composition and concentration profiles. Successful applications of the method are illustrated by 18O(p,α0)15N and 12C(d,p0)13C reactions and elastic scattering of (4He)+ ions, for three types of samples. SEM microscopy is used as a complementary technique for surface imaging.

Surface analysis is made by nuclear, non-destructive, means and computer simulation for the energy method of analysis. The predicted energy spectra are compared to experimental data, giving target composition and concentration profile information. Mainly, target parameterization and available nuclear data are considered in the computations. The method is favourably applied to the determination of an 18O step concentration profile in a thick oxidized target. A uniform concentration profile of 12C is found for a thick target. Elastic scattering permits depth profiling of Al and O in a thick oxide target. © 2017 Institute of Measurement Science SAS.